Installation
24 300855170_002_C8 - 08/2021 - © Leybold
3 Installation
3.1 Conforming utilization
The turbomolecular pump is intended for generating a vacuum. It is suited for
non-corrosive processes only.
The turbomolecular pump must be bolted to a rigid vacuum system and con-
nected to a suitable backing pump.
It is intended for being operated within closed rooms.
The use of any accessories which have not been specified by Leybold is only
allowed after approval by Leybold.
3.1.1 Non-conforming utilization
Non-conforming utilizations for both pump and frequency converter are
among others:
■
Pumping of gases and vapours for which the materials of the pump are
unsuitable.
■
Operation in connection with processes in which GaAs (gallium arsenide) is
being pumped.
■
Pumping of gas mixtures with an oxygen content of > 21%.
■
Pumping of corrosive gases and dust containing gases without reverting to
purge gas operation.
■
Pumping of condensable vapours without suitably controlling the tempera-
ture of the pump. Upon compression within the pump, these vapours may
condense or form deposits.
■
Pumping of dusts and solids without the use of suitable screens and filters.
■
Operation at an inadmissibly high forevacuum pressure.
■
Operation at inadmissibily high gas loads.
■
Utilization of both pump and frequency converter in explosion hazard
areas.
■
Non-compliance of the specified maintenance and servicing intervals
■
Operation of the pump and drive electronics in environments which
demand a higher protection type than that of the pump and where the
installation site is over 4000 m the above sea level.
■
Utilization in systems and pump systems in which the pressure may
exceed 1.4 bar abs.
■
Operation with an inadequately mounted pump
■
Operation without having flanged the pump to the system or without hav-
ing connected it to a suitable backing pump.
■
Operation with additional heat sources involving thermal radiation, thermal
conduction via the high vacuum or the forevacuum flange, strong magnetic
fields or very hot process gases, for example. In environments with water
cooling operation, CF flanges may be baked-out up to 100 °C.
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