Contents
3300855170_002_C8 - 08/2021 - © Leybold
The TURBOVAC allows through both standard and optional interfaces con-
trolling of the pump and setting up of some pump functions according to
specific requirements. The Operating Instructions 300450826 Serial
Interfaces for TURBOVAC i/iX offers detailed information on the RS 232,
RS 485, Profibus and USB interfaces of the TURBOVAC.
The Operating Instructions 300687441 TURBOVAC iX EtherCAT Interface
offers information on the EtherCAT Interface.
The Operating Instructions 300905828 TURBOVAC i Interface Module
describes the Anybus modules.
These Operating Instructions are a translation of the German original instruc-
tions 300855170_001_C8.
4 Operation 49
4.1 Media compatibility / purge gas 49
4.2 Interfaces 49
4.3 Switching on 51
4.4 Shutting down 52
4.5 Venting 53
4.6 Bakeout 54
4.7 Operation after a longer storage period 54
4.8 Removing the pump from the system 55
5 Maintenance 56
5.1 Cleaning 56
5.2 Leybold Service 56
5.3 Bearing monitoring and conditioning 57
6 Troubleshooting 59
7 Waste Disposal 61
Certificates 62
EU Declaration of Conformity 63
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