Installation
29300855170_002_C8 - 08/2021 - © Leybold
The flange material to which the pump is bolted, must have at operating tem-
perature a minimum strength specification of 150 N/mm
2
.
If several turbomolecular pumps are installed to the vacuum chamber of the
same system, there is the risk of interference (vibration interference between
the pumps). If such a risk exists please contact Leybold Application Support.
The standard mounting arrangement for the pump is adequate to ensure
earthquake protection. If required mount the system to the floor or the walls.
Install a splinter guard or an inlet screen
To protect the TMP against foreign material from the vacuum vessel we rec-
ommend to mount a centering ring with a fine or coarse inlet screen at the
high vacuum flange, though this will reduce the pumping speed at the cham-
ber flange.
Reduction of the pumping speed in % H
2
He N
2
Ar
Fine inlet screen DN 160/200/250 6 9 20 23
Coarse inlet screen DN 160/200/250 1 2 6 7
Damages caused during operation without the inlet screen are excluded from
warranty.
Flange mounting for ISO-K flanges
When flanging on the high vacuum connecting flange, place the O-ring on
the centering ring. The O-ring must remain in place smooth and untwisted.
Thereafter put the outer ring (support ring) in place.
Mount the turbomolecular pump according to Fig. 3.3 and 3.4 and tighten
the bolts crosswise step-by-step.
When using an ultra sealing ring, always use an outer support ring. The infor-
mation on the number of bolts and clamps also applies to the ultra sealing
rings.
Required for the installation:
■
mounting kit (accessories)
■
coarse or fine inlet screens (accessories, optional)
The contact surfaces of pump housing, vacuum system and centering ring
must be free of grease and dry so as to ensure adequate strength in case
the rotor should seize.
NOTICE
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