LEYBOLD TURBOVAC i(X) User Manual

Description
18 300855170_002_C8 - 08/2021 - © Leybold
Gasmode: leichte Gase
Gasdurchsatz in mbarl/s
10
-6
10
-4
100
10
-2
Druck in mbar
10
-6
10
-4
10010
-2
1
10
-9
10
-8
1
Saugleistung
Kühlwasser 15 °C, 100 l/h
Kühlwasser 35 °C, 50 l/h
Saugleistung TRIVAC D 4 B
Saugleistung ECODRY 65 plus
Saugleistung DIVAC 3.8 HV3
Operationsdiagramm TURBOVAC 1350/1450i für Stickstoff*
Gasdurchsatz in mbarl/s
10
-6
10
-4
100
10
-2
Druck in mbar
10
-6
10
-4
10010
-2
1
10
-9
10
-8
Operationsdiagramm TURBOVAC 1350/1450i für Argon
1
Saugleistung
Kühlwasser 15 °C, 100 l/h
Kühlwasser 35 °C, 50 l/h
Saugleistung TRIVAC D 4 B
Saugleistung ECODRY 65 plus
Saugleistung DIVAC 3.8 HV3
Fig. 1.10 Operation diagrams for TURBOVAC 1350 i and 1450 i
Operation diagram for nitrogen* for the TURBOVAC 1350/1450i
Throughput
Cooling water 15 °C, 100 l/h
Cooling water 35 °C, 50 l/h
Throughput TRIVAC D 4 B
Throughput ECODRY 65 plus
Throughput DIVAC 3.8 HV3
Gas throughput in mbar·l/s
Pressure in mbar
Operation diagram for argon for the TURBOVAC 1350/1450i
Throughput
Cooling water 15 °C, 100 l/h
Cooling water 35 °C, 50 l/h
Throughput TRIVAC D 4 B
Throughput ECODRY 65 plus
Throughput DIVAC 3.8 HV3
Pressure in mbar
Gas throughput in mbar·l/s
* For a high gas throughput with N
2
please contact Leybold.

LEYBOLD TURBOVAC i(X) Specifications

General

Brand	LEYBOLD
Model	TURBOVAC i(X)
Category	Water Pump
Language	English