Troubleshooting
60 300855170_002_C8 - 08/2021 - © Leybold
Malfunction Possible cause Remedy Shut
down
Pump overload, pump
cannot keep up its speed.
When the speed drops
below approx. 90%* of
the nominal speed the red
LED flashes. When this
continues for more than
12min* the pump shuts
down.
Forevacuum pressure too high.
Gas flow too high
Fan defective
Water cooling switched off
Check the ultimate pressure of the backing
pump and install a bigger backing pump if req.
Seal leak, check process
Replace fan
Switch on water cooling
yes
Turbomolecular pump
does not reach ultimate
pressure.
Measurement instrument defective
Measurement sensors soiled
Leaks at the equipment, lines or the
pump
Pump soiled
Forevacuum pump pro vides insuffi-
cient pumping speed or ultimate
pressure which is too high.
Frequency parameters programmed
wrongly
Inspect the measurement sensor
Clean or replace the sensors
Check for leaks
Clean the pump
Check the ultimate pres sure of the forevacuum
pump and install a higher-capacity vacuum
pump if necessary
Check parameters.
no
Running pump can not
be stopped via X1
Pump has been started via the serial
interface, the interface controls the
pump
Disconnect the DC supply or connect serial
interface and stop via bus
no
Connected accessories
do not operate as
intended
Accessories incorrectly connected or
w wrong function code has been set
up or function code dependent
parameters have not been properly
set up.
Check the settings for the function codes and
the corresponding parameters OR check to
ensure that the accessories have been connect-
ed to the correct accessory connection.
no
* Default values for normal operation threshold (P25) and max. run-up time (P32), can be changed via serial interface.
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