Installation
32 300855170_002_C8 - 08/2021 - © Leybold
Flange mounting for CF flanges
Before fitting, check to ensure that the sealing edge is undamaged. Do not
touch the copper gasket and the sealing edge with your bare hands.
The contact surfaces of pump housing, vacuum system and centering ring
must be free of grease and dry so as to ensure adequate strength in case
the rotor should seize.
Mount the turbomolecular pump according to Fig 3.5 and tighten the bolts
step-by-step.
When the pump shall be baked out, the threads of the bolts should have
been lubricated with a high temperature lubricant.
Required for the installation:
■
mounting kit (accessories)
■
coarse or fine inlet screens (accessories, optional)
During operation the pump can get so hot that there is the risk of suffer ing
burns (up to approximately 65 °C). Protect the hot parts against being
touched.
Flange mounting for ISO-F flanges
Mount the turbomolecular pump according to Fig 3.6 and tighten the bolts
crosswise step-by-step.
The contact surfaces of pump housing, vacuum system and centering ring
must be free of grease and dry so as to ensure adequate strength in case
the rotor should seize.
NOTICE
CAUTION
NOTICE
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