4.4 Shutting down
Switch off the pump at the frequency converter.
Refer to the frequency converter operating instructions for details.
Switch off the forevacuum pump.
Vent the TURBOVAC before it has come to a full standstill; refer to Section
4.5.
In TRIVAC pumps the built-in anti-suckback valve will close automatically and
shut off the forevacuum line. When using forevacuum pumps without an
anti-suck back valve, close the valve in the forevacuum line.
Close off the cooling water supply or switch off the ventilation immediately
after switching off the TURBOVAC in order to avoid condensate formation in
the pump.
If the pump previously handled corrosive gases, it will be necessary to purge
the pump with dry nitrogen for one hour prior to shut-down. When the sys-
tem is not in oper ation, ensure that neither ambient air nor cleaning agents
can enter the TURBOVAC.
If a failure occurs the turbomolecular pump will be shut down automatically.
The red LED at the frequency converter lights up.
Unplug any connectors only when the mains voltage is switched off and
the pump does no longer turn (the green LED is off).
Venting
CAUTION
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