Page
0 Important Safety Information 5
0.1 Mechanical hazards 5
0.2 Electrical hazards 6
0.3 Thermal hazards 7
0.4 Hazards caused by materials and substances 7
0.5 Danger of ignition 8
0.6 Dangers in connection with safety-related
measures and precautions 8
0.7 Risk of damaging the pump 8
1 Description 9
1.1 Design 9
1.2 Standard equipment 9
1.4 Ordering data 13
1.5 Accessories 13
2 Transport and storing 15
3 Installation 16
3.1 Conforming utilization 16
3.1.1 Non-conforming utilization 16
3.2 Operating environment 18
3.3 Fitting accessories 18
3.4 Attach the pump to the vacuum chamber 19
3.5 Forevacuum connection 25
3.6 Connect the cooling 26
3.7 Connecting the purge gas and venting device 29
3.8 Connecting the frequency converter 30
4 Operation 32
4.1 Media compatibility / purge gas 32
4.2 Start-up 32
4.3 Switching on 33
4.4 Shutting down 34
4.5 Venting 35
4.6 Bakeout 36
4.7 Removing the pump from the system 36
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