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LEYBOLD VARODRY VD100 - Noise, Vibration, and Other Issues

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Cause Wrong setting of gas ballast
Remedy Correct if applicable
Cause Inlet seal purge is defective
Remedy Contact us
Cause Loose gas ballast connection
Remedy Check tight t of gas ballast parts
Cause Cold pump
Remedy Wait for 30 minutes to warmup the pump
Cause Wrong voltage wiring
Remedy Check with drawing in the motor connection box
Cause Wrong position or type of vacuum gauge
Remedy Check pressure direct at the inlet port. We recommend type TTR or CTR 0.1 torr
Cause Purge connection is loose
Remedy Tighten the purge connection and check tight t of hose
Fault Pump is noisy or has high vibration level
Cause Pump is clogged with process deposition
Remedy Follow the cleaning instructions
Cause Belt is worn or defective
Remedy Exchange the belt
Contact us
Cause Bearing is defective
Remedy Contact us
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300766038_002_C3 - 09/2021 - © Leybold
Troubleshooting

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