Mitutoyo TM-500 Series - Table of Contents

CONTENTS
㩷
PREFACE...........................................................................................................................
γ
CONVENTIONS USED IN THIS MANUAL...................................................................
γ
PRECAUTIONS.................................................................................................................
δ
WARRANTY .....................................................................................................................
ε
1. Outline .............................................................................................................................. 7
1.1 Description..............................................................................................................7
1.
2 Name of Each Part .................................................................................................8
2. Installation and Setup .....................................................................................................11
2.1 Package Contents ..................................................................................................11
2.2 Installation Site .....................................................................................................11
2.3 Setting-up..............................................................................................................12
2.4 Checking and Adjustment.....................................................................................13
2.4.1 Checking the reticle position against the XY stage movement direction ..13
2.4.2 Checking the centering of the reticle .........................................................13
2.4.3 Adjusting the reticle...................................................................................14
3. Measurement ..................................................................................................................17
3.1 Preparations for Measurement.............................................................................. 17
3.1.1 Precautions for measurement .....................................................................17
3.1.2 Replacing the lenses...................................................................................18
3.1.3 Fixing the workpiece.................................................................................. 18
3.1.4 Illumination modes.....................................................................................19
3.1.5 Replacing reticles.......................................................................................20
3.1.6 Adjusting the diopter..................................................................................20
3.1.7 Bringing the measuring surface into focus.................................................21
3.1.8 Positioning the workpiece ..........................................................................21
CONTENTS
iv