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Newport Vibration Control System - Page 38

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vii
Table Height Sensor
Control Arm
Over-pressure
Relief Valve
Air Supply Line
Isolator
Pressure Gauge
Exhaust Port
1⁄8 NPT
Metering
Needle Valve
Air Line to Isolators
Model IPV Leveling Valve
Mounting
Screw
Holes
Valve: Model IPV
Leveling Accuracy: ±0.010 in (.25 mm) standard**
Materials: Glass fiber reinforced polycarbonate
brass
Available in non-magnetic version
Exhaust may be captured by clean room
vacuum system
** Higher accuracies are available by special order.

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