7
CIDRW System
User’s Manual
INTRODUCTION
Applicable SEMI Standards
INTRODUCTION
Applicable SEMI Standards
This CIDRW system complies with the following standards.
• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)
• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.
To Next Page
Loading...
