GB 02999 - Edition 07 - 01/2017
1/3
B 330
Nitrogen purge and air inlet valve
device connections
Nitrogen
characteristics
Depending on the application, the inert gas purge can consist of:
– injecting ambient air, or
– injecting an inert gas into the pump.
In this manual, the inert gas will be called ‘nitrogen’, as it is the most
commonly used gas.
For more information about the type of purge gas, contact your service
centre Pfeiffer Vacuum.
H
2
O concentration < 10 ppm v
O
2
Concentration < 5 ppm v
Dust < 1 μm
Oil < 0.1 ppm v
Pression absolue 1 ·10
3
to 1.2 ·10
3
hPa
A filtered dry nitrogen supply with the characteristics defined is required
for optimum performance, see below.
When the inert gas purge is stopped, the pumped gases can pass
from rough vacuum side to high vacuum side and damage the
maglev bearings.
It is advised to maintain the purge flow as long as the rotor is
running to protect pump internal parts.
Pressurised circuit
To work safely on the product, the operator must:
Install a manual valve on the nitrogen circuit at a distance of 3 m from
the product, so that the nitrogen supply can be locked.
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M
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