34 Version: 1.1.0 PZ251E P-587 Positioner
P-587.6CD Unit Tolerance
Mechanical properties
Stiffness in X / Y / Z 0.55 / 0.55 / 1.35 N / µm
Resonant frequency in X / Y / Z, no load 103 / 103 / 235 Hz ±20 %
Resonant frequency in X / Y / Z, under load,
500 g
Resonant frequency in X / Y / Z, under load,
2000 g
Drive properties
Electrical capacitance in X / Y / Z
Miscellaneous
Operating temperature range
Cable length 3.0 m ±10 mm
Sensor / voltage connection 2 × D-sub 25W3 (m)
* When mounted horizontally (standing on a surface, not suspended).
The maximum rotational angle in θ
Z
is 8 mrad, the tip/tilt angles in X and Y are 3 mrad.
Due to the parallel kinematics design, simultaneous linear motion in X or Y is not possible in the
extreme position of the tip/tilt angle.
The resolution of the system is limited only by the noise of the amplifier and the measuring
technology because PI piezo nanopositioning systems are free of friction.
All specifications based on room temperature (22 °C ±3 °C).