PI P-587.6CD - Technical Data; Specifications; Data Table

10 Technical Data
P-587 Positioner PZ251E Version: 1.1.0 33
Subject to change. You can find the latest product specifications on the product web page at
www.pi.ws (https://www.pi.ws).
In this Chapter
Specifications ............................................................................................................................... 33
Ambient Conditions and Classifications ....................................................................................... 35
Dimensions .................................................................................................................................. 36
Torque for Stainless Steel Screws (A2-70) ................................................................................... 36
Pin Assignment ............................................................................................................................ 37
10.1 Specifications
10.1.1 Data Table
P-587.6CD Unit Tolerance
Active axes
X, Y, Z, θ
X
, θ
Y
, θ
Z
Motion and positioning
Integrated sensor
Capacitive
Travel range in X, Y, closed loop
800
µm
Travel range in Z, closed loop
200
µm
Tip/tilt angle in θ
X
, θ
Y
, closed loop
±0.5
mrad
Tip/tilt angle in θ
Z
, closed loop
±0.5
mrad
Resolution in X, Y, open loop / closed loop
0.9 / 2.2
nm
typ.
Resolution in Z, open loop / closed loop
0.4 / 0.7
nm
typ.
Resolution in θ
X
, θ
Y
, open loop / closed loop
0.05 / 0.1
µrad
typ.
Resolution in θ
Z
, open loop / closed loop 0.1 / 0.3 µrad typ.
Linearity error in X, Y, Z 0.01 % typ.
Linearity error θ
X
, θ
Y
, θ
Z
0.1
%
typ.
Repeatability X, Y
±3
nm
typ.
Repeatability in Z
±2
nm
typ.
Repeatability in θ
X
, θ
Y
±0.1
µrad
typ.
Repeatability in θ
Z
±0.15
µrad
typ.
Flatness
<15
nm
typ.
10
Technical Data