Page 10 of 12
7.1 Range Selection
High accuracy will be acquired by the appropriate range and radix. Normally the full range should be 1,000. For
example, if the full scale of MFC/MFM is 30SCCM or 30SLM, the full scale range of the box should be 30.0 (one
decimal place) instead of 30. Another one, if full scale of MFC/MFM is 1SLM, the full scale range of the box
should be 1.000. And if full scale of MFC/MFM is 10SCCM or 10SLM, the full scale range of the box should be
10. 00.
7.2 Range Adjustment
Please select “INT”, and short the pin 4(set) and pin 7(flow readout) of without connection with the MFC/MFM
firstly. And adjust the “Set” potentiometer to maximum value. Then, adjust the “Range adjustment” potentiometer
to the value you want.
7.3 Radix Point Adjustment
Figure 5 shows the configuration of radix point adjustment. The corresponded relations are showed in Table 4.
Figure 5. Radix Point Position Switch Table 4. Radix Point Position Table
8. MAINTENANCE
8.1 Internal Potentiometer Adjustment
All internal potentiometers in the device have been already adjusted before delivery. Please do NOT adjust it.
8.2 Grounding Connection
In principle, the ground of the Flow Readout Box (Power GND) and the cover of MFC (or MFM) should be
connected for sharing the same grounding place. But they can be connected with the bases respectively, if the
connection cable is too long. In this way, please make sure the box must NOT be connected with ground of the
MFC because ground wire may be broken, even burning.
Pointer Position
Radix Point
Postion
0or 8 XXXX
1or 9 X.XXX
2 XX.XX
4 XXX.X
To Next Page
Loading...