www.Siargo.com
MF4700UserManual
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1. Overview
Allcontactinformationcanbefoundattheendofthismanual.
ThismanualprovidesessentialinformationfortheoperationoftheMF4700seriesofgasmassflow
meters for general‐purpose gas flow monitorand control applications. The product performance,
maintenance,andtrouble‐shootingaswellastheinformationfor
productorder,technicalsupport,
andrepairarealsoincluded.
MF4700massflowmetersaredesignedforgeneralpurposepreciseindustrialgasprocessingmonitor,
orcontrol.Themeterseriescoverawidedynamicflowrangewithaworkingpressureratingofupto
1.0MPa,andatemperaturerangingfrom‐10
to55°C.
ThemetersareoperatedwithSiargo’sproprietaryMEMScalorimetricmassflowsensorstogether
with the smart control electronics. The sensor surface is passivated with silicon nitride ceramic
materialstogetherwith a water/oilproofnano‐coatingforperformanceand reliability.Themeter
bodyismadeofeitheraluminumalloyor
stainlesssteelthatisavailableforapplicationsofmostof
thegases.