Operations Model 6DS-SP Planarizer
viii Version 4.0 - February 1998
No Response from Keyboard or No Response from Machine--
Part A 29
No Response from Keyboard or No Response from Machine--
Part B 30
ERROR MESSAGES AND ALARMS 31
“LEFT SPINDLE FORCE LOW ALARM” - # 1 32
“LEFT SPINDLE FORCE HIGH ALARM” - # 2 32
“RIGHT SPINDLE FORCE LOW ALARM” - # 5 32
“RIGHT SPINDLE FORCE HIGH ALARM” - # 6 32
“LEFT SPINDLE FORCE LOW ALARM” - # 1 33
“LEFT SPINDLE FORCE HIGH ALARM” - # 2 33
“RIGHT SPINDLE FORCE LOW ALARM” - # 5 33
“RIGHT SPINDLE FORCE HIGH ALARM” - # 6 33
“LEFT SPINDLE SPEED LOW ALARM” - # 3 34
“LEFT SPINDLE SPEED HIGH ALARM” - # 4 34
“RIGHT SPINDLE SPEED LOW ALARM” - # 7 34
“RIGHT SPINDLE SPEED HIGH ALARM” - # 8 34
“LEFT SPINDLE SPEED LOW ALARM” - # 3 35
“LEFT SPINDLE SPEED HIGH ALARM” - # 4 35
“RIGHT SPINDLE SPEED LOW ALARM” - # 7 35
“RIGHT SPINDLE SPEED HIGH ALARM” - # 8 35
“TABLE TEMP LOW ALARM” - # 9 36
“TABLE TEMP HIGH ALARM” - # 10 36
“TABLE SPEED LOW ALARM” - # 11 36
“TABLE SPEED HIGH ALARM” - # 12 36
“SLURRY 1 FLOW LOW ALARM” - # 13 37
“SLURRY 1 FLOW HIGH ALARM” - # 14 37
“SLURRY 2 FLOW LOW ALARM” - # 17 37
“SLURRY 2 FLOW HIGH ALARM” - # 18 37
“SLURRY 1 pH LOW ALARM” - # 15 38
“SLURRY 1 pH HIGH ALARM” - # 16 38
“SLURRY 2 pH LOW ALARM” - # 19 38
“SLURRY 2 pH HIGH ALARM” - # 20 38
“CONDITIONING ARM POSITION ERROR” - # 50 39
“LEFT SPINDLE VACUUM SWITCH OFF” - # 51 40
“RIGHT SPINDLE VACUUM SWITCH OFF” - # 52 40
“SEND CASSETTE(S) NOT ACTIVE” - # 53 42
“ROBOT TOP/BOTTOM NOT AT ZERO” - # 54 42
“LEFT SPINDLE NOT UP” - # 55 43
“RIGHT SPINDLE NOT UP” - # 56 43
“AXIS 1 SERVO AMPLIFIER FAULT” - # 57 (Left Spindle) 44
“AXIS 2 SERVO AMPLIFIER FAULT”- # 58 (Right Spindle) 44
“AXIS 3 SERVO AMPLIFIER FAULT” - #59 (Bridge Travel) 44
“AXIS 4 SERVO AMPLIFIER FAULT” - #60 (Table) 44
“ROBOT TRAVEL NOT HOMED” - # 63 45
“ROBOT TOP AXIS NOT HOMED” - # 64 45
“ROBOT Bottom AXIS NOT HOMED” - # 65 45
“ROBOT UP/DOWN AXIS NOT HOMED” - # 66 46
“WAFER FOUND ON ROBOT” - # 67 46
“BRIDGE TRAVEL NOT HOMED” - # 68 46
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