Strasbaugh Table of Contents
Version 4.0 - February 1998 vii
CLEANING STATION PAD PRESSURE ADJUSTMENTS 90
Cylinder Pressure / Pad Force Table 91
Procedure for Setting Pressure 92
Chapter 4 Machine Setup 4-1
OVERVIEW 3
Menu Grouping 3
Recipe Definition and Process Setup 4
“On the Fly” Recipe Parameter Changes 5
Machine Setup 5
SLURRY FLUSH MENU 6
RECIPE MANAGEMENT MENU 9
(AUTO) POLISH PARAMETERS MENU 12
SWEEP PARAMETERS MENU 19
CONDITIONING/CLEANING PARAMETERS MENU 23
MACHINE PARAMETERS MENU 32
ALARM PARAMETERS MENU 43
MACHINE SETUP MENU 47
PASSWORD MENU 50
Chapter 5 Troubleshooting 5-1
OVERVIEW 6
ALARM LOG MENU 8
Function Key Choices Available at the Alarm Log Menu 10
FREQUENTLY ENCOUNTERED PROBLEM CONDITIONS 11
Machine Won’t Power Up 12
Machine Won’t Home 13
Cycle Won’t Start--Part A 14
Cycle Won’t Start--Part B 15
Power Goes Off During Cycle 16
Machine Halts During Cycle with Power Still on but Motion
Suspended - Part A 16
Machine Halts During Cycle with Power Still on but Motion
Suspended - Part B 18
Water Sprayer Won’t Spray 19
Elevator Tanks Won’t Hold Water 20
Wafers Left on Table - Part A 21
Wafers Left on Table - Part B 22
Wafers Break During Polish Cycle - Part A 22
Wafers Break During Polish Cycle - Part B 24
Carriers Drop Off Spindles 25
Robot Drops Wafers--Part A 26
Robot Drops Wafers--Part B 27
Software (Computer) problems 29
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