Strasbaugh Machine Setup
Version 4.0 - February 1998 4 - 3
MACHINE SETUP
OVERVIEW
This chapter addresses the process setup (recipe), machine setup, and
password menus of the 6DS-SP 4.25 control software. For details on using
the 6DS-SP software interface, refer to the Operator Functions chapter of
this manual. Note also that for user convenience some information in this
chapter is repeated in the Operator Functions chapter.
Assumptions - the procedures in this chapter were written with the
assumptions that:
1. The operator/user has read chapters One, Two, and Three of this manual
(Introduction, Machine Description, and Operator Functions).
2. The machine has been correctly installed and maintained, per procedures
found in the 6DS-SP Maintenance manual.
MENU GROUPING
The menus are divided into five groups:
• Operation
• Process Setup (recipe)
• Machine Setup (routinely changed machine setups that are not
process related)
• Maintenance
• Miscellaneous
Both the Slurry Flush Menu and Recipe Management Menu apply to
operation and recipe setup.
Menu select function key label rows are organized as shown below. One
group at a time is displayed.
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