Operations Model 6DS-SP Planarizer
4 - 2 Version 4.0 - February 1998
OVERVIEW 3
Menu Grouping 3
Recipe Definition and Process Setup 4
“On the Fly” Recipe Parameter Changes 5
Machine Setup 5
SLURRY FLUSH MENU 6
RECIPE MANAGEMENT MENU 9
(AUTO) POLISH PARAMETERS MENU 12
SWEEP PARAMETERS MENU 19
CONDITIONING/CLEANING PARAMETERS MENU 23
MACHINE PARAMETERS MENU 32
ALARM PARAMETERS MENU 43
MACHINE SETUP MENU 47
PASSWORD MENU 50
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