Operations Model 6DS-SP Planarizer
4 - 4 Version 4.0 - February 1998
Figure 4-1 Menu Grouping
RECIPE DEFINITION AND PROCESS SETUP
The recipe is defined as everything seen in the Slurry Flush Menu and
everything in the "parameter" menus. (Note: With previous software, only
polish parameter values were saved as the recipe.) Since everything in these
menus can affect processing in some way, they are now included in the
recipe.
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