Operations Model 6DS-SP Planarizer
2 - 42 Version 4.0 - February 1998
SLURRY SYSTEM CONNECTION
Related Engineering Drawings
• 217946F1
Water and Vacuum Diagram
• 117770A1
Slurry Tanks Rear View
• 220014E1
Third Peristaltic Pump
The Model 6DS-SP Planarizer incorporates two integral slurry systems. A
third slurry pump is available as an option. Refer to the engineering
drawings listed above and Figure 2-1 of the previous section, for the
following discussion.
Each system consists of a mobile slurry cart and an air operated diaphragm
pump. Each slurry cart has three connections via quick-disconnect couplings
on the cart cover. The opposite ends of these lines terminate to the
diaphragm pumps and the slurry system valve plumbing for each system.
The slurry system valve assemblies, located on the outboard side of the left
side electrical cabinet enclosure, are labeled slurry 1 and slurry 2. The
other connections, leading to the diaphragm pumps, are identified in Figure
2-1 as slurry 1 supply (2) and slurry 2 supply (3). The two slurry systems
are identical in plumbing and operation. Engineering drawing 217946F1
shows the layout and terminations of the slurry lines.
(Note that the supply connection for the optional third pump, a peristaltic
pump, is located inside the upper rear service door.)
All three slurry cart connections must be connected correctly for the slurry
systems to operate as designed. The three connections are designated as
slurry supply, slurry main return, and slurry filter return. The slurry
supply lines (2 and 3 of Figure 2-1) supply the slurry to the inlet of the
diaphragm pump which pumps slurry through the machine plumbing. The
slurry main return provides the return path for the slurry as it recirculates
while permitting agitation of slurry in the tank. The slurry filter return is a
low flow recirculating path through which the slurry is filtered to remove
solids and contaminants.
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