Strasbaugh 6DS-SP - Page 116

Operations Model 6DS-SP Planarizer
3 - 8 Version 4.0 - February 1998
Feature Menu(s)
Where to Find Details -
Manual Location(s)
LIGHT TOWER SUPPORT n/a Operations:
• Ch. 2-Machine Description
• Ch. 3-Operator Functions
Maintenance:
• Ch. 2-Physical Description
UNIVERSAL CASSETTE
SUPPORT
Calibration/Configuration
Menu
Maintenance:
• Ch. 10-Software Calibration
• Appendix A-Calibration
Variables
PRE OR POST PAD
CONDITIONING
Conditioning/Cleaning
Parameters Menu
Operations:
• Ch. 4-Machine Setup
SCRUBBER SUPPORT Machine Setup Menu
Calibration/Configuration
Menu
Manual Control Menu
Operations:
• Ch. 4-Machine Setup
Maintenance:
• Appendix A-Calibration
Variables
SLURRY ALARM ACTION
NOTICE
Alarm Parameters Menu
Calibration/Configuration
Menu
Operations:
• Ch. 4-Machine Setup
Maintenance:
• Ch. 10-Software Calibration
• Appendix A-Calibration
Variables
POST POLISH SLURRY
FLUSH
Machine Parameters Menu Operations:
• Ch. 4-Machine Setup