Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 9
MENU GROUPING AND RECIPE DEFINITION
MENU GROUPING
The menus are divided into five groups:
• Operation
• Process Setup (recipe)
• Machine Setup (routinely changed machine setups that are not
process related)
• Maintenance
• Miscellaneous
Both the Slurry Flush Menu and Recipe Management Menu apply to
operation and recipe setup.
Menu select function key label rows are organized as shown below. One
group at a time is displayed.
Figure 3-1 Menu Grouping
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