Operations Model 6DS-SP Planarizer
3 - 10 Version 4.0 - February 1998
RECIPE DEFINITION
The recipe is defined as everything seen in the Slurry Flush Menu and
everything in the "parameter" menus. (Note: With pre-4.00 software, only
polish parameter values were saved as the recipe.) Since everything in these
menus can affect processing in some way, they are now included in the
recipe.
The Machine Setup Menu contains machine setups that are commonly
changed as part of machine operation but are not process related. (Machine
settings which are seldom or never changed reside in the
Calibration/Configuration Menu.)
The maintenance menus work together as a group. If any change is made in
the Manual Control Menu, the status line will show Manual Mode. If any
change is made in the Diagnostic Menu, the status line will show Diag
Mode. As long as menu selection involves only the maintenance menus, the
changes will remain. However, if a door is opened in the manual mode,
choices in the section protected by the door's interlock will be cancelled.
Finally, if a non-maintenance menu is selected, an automatic abort/reset will
occur to clear the changes and reset the machine back to normal.
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