Operations Model 6DS-SP Planarizer
3 - 14 Version 4.0 - February 1998
Status Variable Display Area: The status area, shown at the right side of
all the 6DS-SP menu screens, displays the machine values in real time. The
machine values are inputs from sensors that monitor downforce, speed of
table 1 (and table 2, if installed), and the current draw of table 1. Also
displayed are liquid volume flow for slurries 1 and 2 and pump 3; pH level
for slurries 1 and 2; water flow and temperature for table cooling water;
polish table surface temperature; pad life and wafer counters; and the name
of the recipe currently in use.
Note that for options not installed, value fields in the status area may be
blank.
The status display area is identical for all 6DS-SP menus.
Pad/Carrier Timers/Wafer Counters: The status screen shows timers and
wafer counters for Pad 1, Pad 2, left carrier, right carrier, and lifetime.
Timer and counter information is saved to disk; thus, it will be retrievable
after the machine is turned off.
Choice of Units Displayed: The units for several items shown in the status
area may be selected by the user at the Calibration/Configuration Menu. The
temperature units (calibration variable 93) for table surface temperature and
table cooling water may be displayed as Celsius or Fahrenheit. Back pressure
units (calibration variable 65) may be displayed as psia or psig.
Recipe Name Display: The name of the recipe currently in use is displayed
just above function keys F4 and F5. If a name is showing, the recipe in use
exactly matches the stored recipe.
An exact match occurs after a recipe is retrieved or after one is stored. If the
currently used recipe is altered, the name display will change to "Mod"
(modified) upon quitting the menu at which the change was made.
The currently used recipe name is saved to disk so that it will not be lost if
the machine is turned off.
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