Operations Model 6DS-SP Planarizer
3 - 50 Version 4.0 - February 1998
Wet pad and carrier inserts:
10. Open the Left Side Operator Door.
11. Using the interior operator hand water sprayer:
a. Wet the table pad evenly.
b. Wet the carrier inserts carefully by
spraying up inside the carrier.
DO NOT direct spray up inside machine cabinet.
12. Close all doors to the machine.
13. Start the cycle:
Operator Action Explanation/Screen Display
• <START> Press the black <START>
button, located on the control
panel.
The machine will execute the normal sequence of
loading the wafers onto the carrier(s), performing the
programmed polish cycle, and unloading the wafers
onto the load chuck(s).
During the cycle and after the cycle is finished:
14. Wait for the cycle to finish.
When the cycle is complete, the wafers will be in the receive
cassettes.
15. Open the Elevator Access Operator Door.
16. Raise the cassette sensor arms and remove the cassettes from
both the send and receive elevator sides.
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