Operations Model 6DS-SP Planarizer
3 - 76 Version 4.0 - February 1998
HEATER/CHILLER OPERATION
The heater/chiller unit provides the temperature-controlled water which runs
through the polish table, controlling the surface temperature of the table
during polishing.
For information on utility connections for the unit, refer to the Installation
chapter of the 6DS-SP Maintenance manual.
HEATER/CHILLER CONTROL UNIT AND TEMPERATURE DISPLAY
The control unit and temperature display for the heater/chiller unit are
mounted on the front of the unit’s cabinet.
As hot and cold processing requirements are process-specific, they should be
determined by the process engineer.
As instructed by your supervisor or the process engineer:
1. Refer to the heater/chiller manufacturer documentation
located in the Appendices of the 6DS-SP Maintenance manual
and
2. set the heater/chiller unit’s temperature controls.
WATER TEMPERATURE DISPLAY ON THE 6DS-SP STATUS
The 6DS-SP control program continuously monitors cooling water in and out
temperature and displays the readings in real time in the status area of the
6DS-SP menu screens.
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