Strasbaugh 6DS-SP - Page 186

Operations Model 6DS-SP Planarizer
3 - 78 Version 4.0 - February 1998
CYCLE HALT BUTTON
DURING POLISHING PHASE OF AUTO POLISH CYCLE
Operator Action/
Location When
Result(s)/
Resolution
× Press CYCLE HALT
button.
(Control Panel)
During polishing phase
of Auto Polish Cycle.
• All rotational
movement stops, and
spindles rise.
• Terminates polishing;
suspends wafer
handling until the
CYCLE START
button is pressed.
• Pressing the CYCLE
START button will
continue.
DURING ROBOT WAFER MOVEMENT PHASE OF AUTO POLISH
CYCLE
Operator Action/
Location When
Result(s)/
Resolution
× Press CYCLE HALT
button.
(Control Panel)
During robot wafer
movement phase of
Auto Polish Cycle.
• Robot will go to next
position and stop,
waiting for operator to
press CYCLE START
button.
• When operator presses
CYCLE START
button, the Auto Polish
Cycle resumes, and the
robot begins to move.