Strasbaugh 6DS-SP - Page 187

Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 79
“FINISH” AN AUTO POLISH CYCLE
Operator Action/
Location When
Result(s)/
Resolution
× Choose “Finish Cycle”
at the Auto Polish
Cycle menu to select
the finish cycle
feature.
(Keyboard)
During Auto Polish
Cycle.
• The finish cycle feature
causes automatic
operation to end when
the currently
processing wafers are
finished.
• As a reminder, the
screen will display
"FINISHING
CYCLE". When the
polishing cycle ends,
after putting the
wafer(s) into a receive
cassette, the menu will
return to normal and
the "FINISHING
CYCLE" message will
disappear.
Pressing the START
button will re-start
automatic operation.