Strasbaugh 6DS-SP - Page 188

Operations Model 6DS-SP Planarizer
3 - 80 Version 4.0 - February 1998
“ABORT” AN AUTO POLISH CYCLE OR OTHER
MACHINE MOTION
Operator Action/
Location When
Result(s)/
Resolution
× Press <F10> to select
“Abort/Reset”.
Note: You must press
<F10> twice to abort
the cycle; the second
time confirms your
selection.
(Keyboard)
During Auto Polish
Cycle.
• All rotational
movement stops, and
spindles rise.
• Terminates Auto Polish
Cycle or other motion
and returns all
components to default
status.
Remove wafers left in
the machine and, if
desired, begin new
cycle.
• If robot arms are
extended when
“Abort/Reset” is
selected, robot will
move arms back to
home position.
Remove wafer, if
needed, and begin new
cycle.