Strasbaugh 6DS-SP - Page 189

Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 81
OPEN DOOR
Operator Action/
Location When
Result(s)/
Resolution
× Open service door.
(Machine Cabinet)
× Open polish area
operator door.
(Machine Cabinet)
× Open elevator area
operator door.
(Machine Cabinet)
During Auto Polish
Cycle.
During Auto Polish
Cycle.
During Auto Polish
Cycle.
• All rotational
movement stops, and
spindles rise.
• Terminates Auto Polish
Cycle.
• Shuts down machine
power.
• Remove wafer(s) if
needed, close door,
power up, home the
machine, and begin a
new cycle.
• Suspends Auto Polish
Cycle.
• Close door and press
the CYCLE START
pushbutton to resume
the cycle.
• Suspends elevator
movement and robot
movement in the
elevator area.
• Close door and press
the CYCLE START
pushbutton to resume
the cycle.