Strasbaugh 6DS-SP - Page 190

Operations Model 6DS-SP Planarizer
3 - 82 Version 4.0 - February 1998
EMERG OFF BUTTON
Operator Action/
Location When
Result(s)/
Resolution
× Press EMERG OFF
button.
(Control Panel)
At any time after
machine is powered up.
• Shuts all power to the
machine down.
• All rotational
movement stops, and
spindles rise (if they
are not already up).
• Screen display goes
blank.
• Terminates Auto Polish
Cycle.
• Remove wafer from
robot, if needed.
• Correct problem.
• Power up machine and
perform home
sequence routine.
• Begin new cycle.