Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 83
PROCEDURE FOR SAFE REMOVAL OF WAFER
FROM ROBOT
WHEN TO USE? Use the procedure below when machine power is
still on but motion has been suspended (by pressing the CYCLE HALT
button, opening a door, or “Aborting” at the Auto Polish Menu during a
polishing cycle).
Note: This procedure requires two operators.
If the robot is holding a wafer when a cycle is terminated, remove it by
following Steps 1. through 9., below.
Operator #1:
1. Prepare to catch the wafer.
Hold open hands under wafer, waiting to catch the wafer
as it drops.
Operator # 2:
Operator Action Explanation/Screen Display
2. <F9> Press the F9 key to choose
“Select Menu”.
3. <F9> Display the alternate list of
menus by pressing the F9 key to
select “OTHER”.
4. <F2> Press the F2 key to display the
Manual Control Menu.
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