Operations Model 6DS-SP Planarizer
3 - 84 Version 4.0 - February 1998
Operator Action Explanation/Screen Display
5. <F2> At the Manual Control Menu,
press the F2 key to the highlight
bar down to the “End Effector
On/Off” line.
6. <F3> Press the F3 key until “Off” is
displayed.
7. <F4> Press the F4 key to confirm
turning robot end effector
vacuum off.
Operator #1:
8. The wafer will now drop from the robot--Be sure to
catch it!
Operator #2:
Operator Action Explanation/Screen Display
9. <F9> Press the F9 key to choose
“Select Menu”.
You may now begin a new auto polish cycle at the Auto
Polish Cycle Menu or move to another desired menu
location.
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