Operations Model 6DS-SP Planarizer
4 - 16 Version 4.0 - February 1998
Item Function(s)
Bk Prs Ramp
Sets the number of seconds for the backpressure to
linearly ramp from the last step value to the next
step value.
Spindle Speed
Sets the spindle speed for polishing.
Range: 0-250 rpm
Table Speed
Sets the table speed for polishing.
Ranges: • 0-250 rpm for standard
machines
• 0-l00 rpm for low speed
machines
• 0-l 75 rpm for optional
second table
Slurry l Flow
Sets the flow rate for the Slurry l pump.
Zero disables the pump.
Slurry 2 Flow
Sets the flow rate for the Slurry 2 pump.
Zero disables the pump.
Pump 3 Flow
Sets the flow rate for the optional Pump
3.
Zero disables the pump.
Rns Flow (0, l)
Sets whether the DI water rinse should be
on during the step.
"0" means "off", and " l " means "on".
For two table machines, selecting rinse
flow in steps l through l 0 will cause the
primary table rinse to turn on during
primary table polishing. Selecting rinse
flow in steps l through 20 will cause the
second table rinse to turn on during
second table polishing.
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