Strasbaugh Machine Setup
Version 4.0 - February 1998 4 - 17
ADDITIONAL FEATURES
PRESETTABLE WAFER POLISH COUNT:
This feature permits the operator to set the machine to polish a finite number
of wafers and stop automatically. Presettable Wafer Polish Count is
applicable in the automatic (cassette to cassette) mode only.
Function key choices No. of Wafers and ALL Wafers show on the Auto
Polish Menu and the Auto Polish Parameters Menu.
If No. of Wafers is selected, the prompt line will ask for a number of wafers
from 1 to 50. Once entered, this value will show in the Wfrs status area of
the screen. This value will be decremented by the number of spindles used
each time a polishing cycle starts. When it reaches zero, the machine status
will automatically change from In Polish Cycle to Finishing Cycle. When
the machine stops, the Wfrs status will automatically switch back to ALL.
If the machine is interrupted, it will remember the wafer count and resume
counting down when polishing is restarted.
If All Wafers is selected, the Wfrs status will display ALL and the machine
will polish wafers indefinitely.
DUAL BACKPRESSURE CONTROL:
This feature permits setting the left and right backpressures in the Polish
Parameters Menu to different values.
This permits compensation for process related left/right differences. It is not
intended to mask other left/ right differences due to machine miscalibration
or carrier differences.
DUAL TIME AND DUAL BACKPRESSURE ENTRY CHOICES:
Polish Time Entry and Backpressure Entry choices are available in the
Machine Parameters Menu. The choices are Left/Right or Matched.
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