Operations Model 6DS-SP Planarizer
4 - 22 Version 4.0 - February 1998
ADDITIONAL FEATURE
PROGRAMMABLE ARM CALIBRATION AND SETUP:
The optional programmable conditioning arm calibration and parameter
setup is now used only to establish a park and table center position. The
Conditioning Parameters Menu has choices that define the sweep endpoints
in terms of inches from the table center.
Sweep Parameters Setup:
Determine the endpoints of the desired arm sweep in terms of the distance in
inches from the table center to the center of the conditioning device. This
will be influenced by wafer diameter, oscillation stroke, and conditioning
device diameter.
In the Sweep Parameters Menu, enter these endpoints as the Outer and
Inner values. The Outer value must be the larger of the two values.
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