Strasbaugh Machine Setup
Version 4.0 - February 1998 4 - 41
ADDITIONAL FEATURES AT THE MACHINE PARAMETERS MENU
DUAL TIME AND DUAL BACKPRESSURE ENTRY CHOICES:
Polish Time Entry and Backpressure Entry choices are available in the
Machine Parameters Menu. The choices are Left/Right or Matched.
If the Left/Right choice is used, left and right parameter values can be
entered separately.
If the Matched choice is used, a value entered into either the left or right
parameter will also be entered into the other. Also, a small bracket line to
the left of the parameters will appear on both the Auto Polish Menu and the
Polish Parameters Menu to indicate that new entries will be linked.
Note: Changing from Left/Right to Matched will not change any
previously entered values.
ODD WAFER POLISHING:
This feature permits a machine set for dual spindle polishing to polish a
single remaining (odd) wafer. This feature is applicable in the automatic
(cassette to cassette) mode only.
Odd Wafer Polish and Odd Wafer Time Adjust choices are available in
the Machine Parameters Menu.
If Odd Wafer Polish is disabled, this feature will not be used. If an odd
wafer situation occurs, the machine will stall and wait for another wafer after
loading the odd wafer on the left load station.
If Odd Wafer Polish is enabled, the machine will attempt to normally place
a wafer first on the left load station and then on the right for every polish
cycle. If, after placing a wafer on the left load station, no more wafers can
be found, the machine will polish the odd wafer using the left spindle only.
The Stat display will show Odd Wafer Polish when polishing begins. When
polishing is finished, the machine will automatically return to normal
polishing and either continue, if more wafers had been presented to the
machine, or stop of the machine still has no more wafers.
To Next Page
Loading...
