Strasbaugh 6DS-SP - Page 308

Operations Model 6DS-SP Planarizer
5 - 50 Version 4.0 - February 1998
“WFR NOT ON SPINDLE, ABORT OR START CLEARS” - #107
Note: “WFR NOT ON SPINDLE” and “WFR FOUND ON SPINDLE” are
the only error conditions that will actually halt an auto cycle.
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
(Halts cycle.)
Control
Computer
Screen
(1) Wafer left on
table at the end of
polishing.
After polishing and
moving the bridge
back to the load
stations, before
beginning pad
conditioning, the
control computer
checks to see if the
wafers are in the
carriers (rather
than left behind on
the table).
(2) If no wafer was
left on the table.
(1a) Visually check to
see if a wafer was left
on the table. If a wafer
was left on the table:
(1b) Abort the cycle by
pressing the F10 key at
the Auto Polish Cycle
Menu.
(1c) Manually clear the
leftover wafer.
(1d) Refer to Wafers
Left On Table, above
in this chapter, for
resolution of the
problem.
OPERATIONS/
MAINTENANCE
(2a) Check the setting
of the wafer chuck
vacuum variable at the
Calibration menu
(calibration variable
174, Wafer absent
error VAC). It should
be set at 11 PSIA. If
needed, change the
value to 11.
MAINTENANCE