Strasbaugh 6DS-SP - Page 310

Operations Model 6DS-SP Planarizer
5 - 52 Version 4.0 - February 1998
“WFR FOUND ON SPINDLE, ABORT CLEARS” - # 109
Note: “WFR NOT ON SPINDLE” and “WFR FOUND ON SPINDLE” are
the only error conditions that will actually halt an auto cycle.
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
(Halts cycle.)
Control
Computer
Screen
(1) Wafer left on
carrier(s) at the end
of polishing.
After polishing and
moving the bridge
back to the load
stations, before
beginning pad
conditioning, the
control computer
checks to see if the
wafers are in the
carriers (rather
than left behind on
the table).
(2) If no wafer was
left on a carrier.
(1a) Visually check to
see if a wafer was left
on a carrier. If a wafer
was left on a carrier:
(1b) Abort the cycle by
pressing the F10 key at
the Auto Polish Cycle
Menu.
(1c) Manually remove
leftover wafer.
OPERATIONS/
MAINTENANCE
(2a) Check the setting
of the wafer chuck
vacuum variable at the
Calibration menu
(calibration variable
172, Wafer Present
error VAC). It should
be set at 7 PSIA. If
needed, change the
value to 7.
MAINTENANCE