Strasbaugh 6DS-SP - Page 322

Operations Model 6DS-SP Planarizer
5 - 64 Version 4.0 - February 1998
“ROBOT ARM NOT ARRIVING AT ZERO” - # 177
“ROBOT ARM NOT ARRIVING AT LEFT SEND” - # 178
“ROBOT ARM NOT ARRIVING AT RIGHT SEND” - # 179
“ROBOT ARM NOT ARRIVING AT LEFT RECV” - # 180
“ROBOT ARM NOT ARRIVING AT RIGHT RECV” - # 181
“ROBOT ARM NOT ARRIVING AT LEFT LOAD” - # 182
“ROBOT ARM NOT ARRIVING AT RIGHT LOAD” - # 183
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Robot arm servo
not arriving at the
commanded
position.
(2) Calibration
variable out of
range.
(1a) Servo tripped out--
Open and close polish
section operator doors
to reset.
(2a) Abort and rehome
robot axes.
OPERATIONS
“ROBOT UP/DN NOT ARRIVING AT TOP” - # 184
“ROBOT UP/DN NOT ARRIVING AT MIDDLE” - # 185
“ROBOT UP/DN NOT ARRIVING AT BOTTOM” - # 186
“ROBOT UP/DN NOT ARRIVING AT ABOVE LOAD” - # 187
“ROBOT UP/DN NOT ARRIVING AT LEFT LOAD” - # 188
“ROBOT UP/DN NOT ARRIVING AT RIGHT LOAD” - # 189
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Robot up/down
servo not arriving
at the commanded
position.
(2) Calibration
variable out of
range.
(1a) Servo tripped out--
Open and close polish
section operator doors
to reset.
(2a) Abort and rehome
axis.
OPERATIONS