Strasbaugh 6DS-SP - Page 410

Maintenance Model 6DS-SP Planarizer
2 - 14 U Version 4.0 - February 1998; Update 11/06/01
Figure 2-2 Utilities Cluster Detail
9 Nitrogen
10 Air
11 DI Water In
12 Table Drain
13 Vacuum
14 DI Water Return
15 Second Table Pan Drain
16 Loader Drain
17 Coolant Out
18 Coolant In
19 Coolant Bypass
20 Wire Pass-Through (no connection)
16
15
14
13
9
10
11
12
17
20
19
18