Maintenance Model 6DS-SP Planarizer
3 - 8 Version 4.0 - February 1998
Figure 3-2 Planarizer Left Side View
12
13 13
11
10
8
9
8 Control Panel of Side Mounted Operator Interface
9 Flat Panel Screen and Keypad of Side Mounted Operator Interface
10 Lower Left Front Service Door (side view)
11 Left Side Service Door
12 Right Side Electrical Cabinet (side view)
13 Elevator Access Doors
The Left Side Service Door (11) provides access to the front and side regulator and
valve assembly panels. The regulator panels hold the regulators for adjusting the
chuck and spindle blow off for left and right wafer carrier positions, load chuck raise
pressure, and wafer blow off pressure as well as other functions.
Note: Wafer blow off pressure is used without a regulator on machines equipped
with back pressure.
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