Strasbaugh Physical Description
Version 4.0 - February 1998 3 - 9
Figure 3-3 Planarizer Right Side View
16
17
18
15
14
14 Front Mounted Operator Interface (side view)
15 Lower Right Front Service Door (side view)
16 Right Top Service Door
17 Lower Right Side Service Door
18 Left Side Electrical Cabinet (side view)
The Lower Right Side Service Door (17), when removed, permits access to the
bridge drive train, polish table drive, the conditioning brush assembly, and
several drain and exhaust hoses. The Right Top Service Door (16) provides
access to the slurry pumps and the bridge assembly lubrication reservoir.
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