Maintenance Model 6DS-SP Planarizer
4 - 2 Version 4.0 - February 1998
Overview 3
Auto Polish Cycle Operation - The Sequence of Events 3
A. Cassette Loading 3
B. Wafer Loading Sequence 4
C. Polish Cycle Sequence 5
D. Wafer Unloading Sequence 6
E. Cassette Removal 7
F. Cycle Halt 7
Bridge Drive Assembly 8
Elevator Assembly 9
Robot Assembly 11
Left/Right Load/Unload Stations 12
Left/Right Carrier/Wafer Cleaning Stations 12
Shuttle Assembly 13
Polish Table Drive Assembly 13
Spindle Drive Assembly 14
Spindle Down Force Assembly 16
Conditioning Arm Down Force Assembly 17
To Next Page
Loading...
