Strasbaugh Mechanical Description
Version 4.0 - February 1998 4 - 3
MECHANICAL DESCRIPTION
OVERVIEW
This chapter provides a detailed narration of the sequence of machine events
comprising the auto polish cycle followed by descriptions of the mechanical
assemblies and components participating in the cycle functions.
AUTO POLISH CYCLE OPERATION -
THE SEQUENCE OF EVENTS
Assumptions - the events sequence (A. through F., below) was written with the
assumption that the machine has been
◊ correctly installed and maintained, per procedures found in the
6DS-SP Maintenance manual.
◊ correctly setup, per procedures in the Machine Setup chapter of the
6DS-SP Operations manual for setup of auto polish cycle parameters,
machine setup parameters, pad and carrier conditioning parameters,
alarm parameters, slurry flush parameters, and program data storage.
◊ powered up, homed, and prepared for an auto cycle, per procedures
found in the Operator Functions chapter of the
6DS-SP Operations manual.
A. CASSETTE LOADING
The operator:
1. places a filled cassette on a send elevator.
2. lowers the elevator cassette sensor arm.
3. places an empty cassette on a receive elevator.
4. lowers the elevator cassette sensor arm.
5. closes the elevator door.
6. presses the <CYCLE START> pushbutton on the control panel.
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