Strasbaugh Plumbing Description
Version 4.0 -February 1998 7 - 5
WATER SYSTEM
D.I. water (deionized water) is used for several functions on the machine: to
supply water to the left and right load rings, the left and right cleaning stations,
the elevator rinse water tank, the left and right carrier rinse, and the optional
curtain and fountain rinses. Deionized water is also used to purge the slurry
lines, to rinse the drain pan and polish table, and to supply two hand held spray
guns, one at the right rear of the machine, the other at the polish table. D. I.
water is also used to purge the carrier via the back pressure system.
The inhouse D.I. water supply is connected to the machine's D.I. water plumbing
at the rear of the machine below the left electrical cabinet. From this junction
point, the D.I. water is distributed by 1/2-inch tubing to solenoids in parallel and
through a regulator before distribution to the slurry delivery systems. The
solenoids are VDC, normally closed, and spring returned water valves. The
solenoids are located on the valve panel assembly, accessible through the lower
left front service door. Slurry 1, slurry 2, and the pump 3 receive their D.I. water
supply for line flushing through the regulator.
Note that the pump 3 option provides a third peristaltic pump which is a pump
only, with no flushing capability and no pH sensor.
EXHAUST SYSTEM
The exhaust system consists of hoses, a fixture surrounding the base of the
polish table, and connection to an inhouse exhaust source. The exhaust system
prevents the build up of vapors during the polishing process from the slurry
solution and traps and exhausts airborne particles from the polishing process. A
six-inch collar at the rear of the machine connects to the inhouse exhaust source.
The exhaust system also collects the exhaust from all the solenoid valves used on
the pneumatic, air pilot and compressed air lines, preventing individual solenoids
from blowing port exhaust into the surrounding atmosphere. The exhaust ports
from the solenoid valves are plumbed to a collection manifold and then to the
six-inch duct of the exhaust system to exit through the inhouse exhaust source.
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