Maintenance Model 6DS-SP Planarizer
7 - 6 Version 4.0 - February 1998
SLURRY SYSTEM
ATTENTION 6DS-SP OWNER!
The chemicals you have selected for use in slurry compounds may be hazardous.
Be sure to follow all local, state, and federal regulations regarding personnel
safety and waste disposal. Refer to suppliers’ material safety data sheets.
Slurry is the medium used during the auto polish cycle for planarization
polishing of the wafers. The Model 6DS-SP has two independent slurry delivery
systems. Refer to engineering drawings 117770A1 217946F1 for the following
discussion on the slurry systems. The two slurry delivery systems, slurry 1 and
slurry 2, are selected by software at the Auto Polish Cycle Parameters menu.
Individually programmed by the user for flow rate and duration of flow, each is
similar in hardware layout and operation.
Whenever the machine is on, as indicated by the Machine On lamp mounted on
the control panel, both slurry delivery systems are closed loops continuously
cycling slurry solution from and to the slurry tanks. A diaphragm pump
circulates the slurry around the loop and keeps the line to the peristaltic pump
pressurized. The two diaphragm pumps, one each for the two slurry delivery
systems, are mounted on a shelf underneath the left electrical cabinet. Whenever
the machine is on, solenoid 10 is energized and remains on, supplying the
compressed air both diaphragm pumps need to continue pumping slurry solution.
During the auto polish cycle, slurry solution flows upon the polish table as
programmed by the operator.
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